Solid-state Thin-film Battery Deposition System
![](../../cm/images/application/battery_3_01.png)
- Vacuum System for All-Solid-State-Battery R&D
- Solid-state Thin-film Battery Deposition System
- Cathode Process – Sputter
- Electrolyte Process – Sputter
- Anode Process – Thermal Evaporator
- Passivation/Encapsulation Process – ALD